![](http://helioslab.fr/wp-content/uploads/2022/10/B-implant-in-Si-702x1024.png)
Implantation profiles
A typical application of SIMS analysis is depth profiling of ions implantation. It allows to check the implanted dose in a sample or match 2 ion implanters.
Beside, an example of implantation of 11B in a silicon matrix. This technique gives an excellent depth resolution and low detection limits.
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